►Plasma Enhanced Deposition & Etching System.

•  RIE-200L: Reactive Ion  Etching System.
• RIE-200iPB: ICP Etching  Systems.
• PD3800: ICP Deposition (PECVD) Systems.
• UV-300: UV-Ozone Cleaning Systems.
• VPE-4F(XeF2): Desktop Xenon Difluoride (XeF2)Etching System.
• Plasma Asher.
• RF Power upto 5KW at 13.56 MHz

Deep RIE System (with Bosch Process) for MEMS.

SAMCO INC

36 Waraya-cho,
Takeda, Fushimi-ku
Kyoto  612-8443
JAPAN
Phone: 81-75-621-7841
Fax: 81-75-621-0936 
Web: www.samco.co.jp

Market Segments
Photonics, MEMS, Failure Analysis, Compound & Silicon, Semiconductor.

• Diffusion furnaces-Horizontal & Vertical
• LPCVD
• Plasma CVD
• Conveyer Furnaces
•  Scrubber Wet/ Dry
• Process Temperatures 200C to 1300C
• Wafer size: Upto 300 mm
• Rapid Thermal Processor (RTA)
• Vacuum Soldering System

 

Centrotherm

Johannes-Schmid-Strasse 8
89143 Blaubeuren
Germany
Phone: (+49) 7344 918-0
Telefax: (+49) 7344 9189-389
Web : www.centrotherm.de

Market Segments:

Semiconductor Production, R&D, MEMS, Neno technology, Quantum Devices.

• R&D Spectroscopic Ellipsometers,
•  UV-VIS IR(160 mm-20µ )
• High Resolution Monochromators,
• Double Spectrometers Grazing X-ray Reflectometry.
• Porositymetry.

                                 

SOPRALAB

26, rue Pierre Joigneaux
Bois-Colombes- 92270,
France
Phone : +33 1 46 49 67 00
Fax      : +33 1 42 42 29 34
Web : www.sopra-sa.com
Market Segments
ARC, Flat panel,
Thin film,
Nano technology.

• WT2000 Wafer Tester for Solar Cells.
• Lifetime scanner,
• Bulk Microdefect Analyzer.
• Resistivity Mapper.
• µ PCD System.
• Microwave Photoconductive decay tool.
• Deep level Spectrometer.
• Non contact Conductivity type tester.
• LBIC

                                 

Semilab Semiconductor Physics Lab. Inc.

Prielle Korelia u.2., H-1117,
Budapest,
Hungary
Phone : +36-1-382-4530
Fax      : +36-1-382-4532
Web     :  www.semilab.com
Market Segments
Nano technology, Semiconductor & Solar Cell

• MOCVD reactors for GaAs,GaN with In,P,Al dopants.
• Compound Semiconductor devices-like LED, Laser diodes, OLED, HEMT,
• Nano Instruments
• Carbon Nanotubes Systems
•  Closed coupled showerhead..
•  Horizontal reactors.
•  Scrubber system.
• ALD, AVD & CVD system for SiGe,HfO,Al2O3
• OLED equipments.
• SiC - CVD reactors.
• Diamond CVD Systems.                 

Aixtron AG

Kackertstr. 15-17
52072 Aachen
Germany
Tel.: +49-241-89091-50
Fax: +49-241-8909-313

Web : www.aixtron.com

Market Segments
Compound semiconductor, Silicon semiconductor, Organic semiconductor, Nano technology.

• Optical Mask Aligners:

• Vacuum contact(proximity up to 9" x 9"  masks)
• Front/back side mask Aligner, IR mask Aligner.
•  UV Exposure system.
• UV Energy/Intensity meter.
   Mask Aligners   Series : 200, 2000, 500 IR, 5000, 800 & 8000,
• Wafer Bonder
• Nano Imprint

Lithography with Sub-20nm Resolution.

Optical Associates Inc.

685 River Oaks Parkway
San Jose, CA 95134, USA
Phone : +1 408 232-0600
Fax      : +1 408 433-9904
Web    :  www.oainet.com

Market Segments
Semiconductor & MEMS Processing.